Patent Assignment
Reel/Frame 014427/0792
Assignment of Assignor's Interest
Recorded: 2003-08-22
Pages: 3
Assignors
EIRIKSSON, ARI
Executed: 2003-08-19
GUELER, RICHARD
Executed: 2003-08-19
PHARAND, MICHEL
Executed: 2003-08-19
Assignee
AXCELIS TECHNOLOGIES, INC.
55 CHERRY HILL DRIVE, BEVERLY, MASSACHUSETTS, 01915-1053
Covered Property
(1)
Uniform Gas Cushion Wafer Support
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.