Patent Assignment
Reel/Frame 014439/0598
Assignment of Assignor's Interest
Recorded: 2003-08-29
Pages: 3
Assignors
HSU, STEPHEN D.
Executed: 2003-08-20
CORCORAN, NOEL
Executed: 2003-08-21
CHEN, JANG FUNG
Executed: 2003-08-20
Assignee
ASML MASKTOOLS, B.V.
DE RUN 6665, 5504 DT, VELDHOVEN, NETHERLANDS
Covered Property
(1)
Method and Apparatus for Performing Rule-Based Gate Shrink Utilizing Dipole Illumination
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.