Patent Assignment
Reel/Frame 014456/0578
Assignment of Assignor's Interest
Recorded: 2003-09-04
Pages: 3
Assignors
VAN DEN BROEKE, DOUGLAS
Executed: 2003-08-25
CHEN, JANG FUNG
Executed: 2003-08-20
LAIDIG, THOMAS
Executed: 2003-08-21
WAMPLER, KURT E.
Executed: 2003-08-21
HSU, STEPHEN
Executed: 2003-08-20
Assignee
ASML MASKTOOLS, B.V.
DE RUN 6665, 5504 DT VELDHOVEN, NETHERLANDS
Covered Property
(1)
Method and Apparatus for Decomposing Semiconductor Device Patterns into Phase and Chrome Regions for Chromeless Phase Lithography
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.