Patent Assignment
Reel/Frame 014501/0655
Assignment of Assignor's Interest
Recorded: 2003-09-12
Pages: 6
Assignors
OWEN, CASSANDRA
Executed: 2003-09-09
SINKWITZ, STEPHAN
Executed: 2003-09-10
TEL, WIM
Executed: 2003-09-10
Assignee
ASML NETHERLANDS B.V.
DE RUN 1110, LA VELDHOVEN, NL-5503, NETHERLANDS
Covered Property
(1)
Adaptive Thermal Control of Lithographic Chemical Processes
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.