Patent Assignment
Reel/Frame 015204/0983
Assignment of Assignor's Interest
Recorded: 2004-04-12
Pages: 4
Assignor
ASML NETHERLANDS B.V. (MERGER)
Executed: 2004-03-30
Assignee
ASML HOLDING N.V.
DE RUN 1110, 5503 LA VELDHOVEN, NETHERLANDS
Covered Property
(1)
Adaptive Thermal Control of Lithographic Chemical Processes
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.