Patent Assignment
Reel/Frame 014514/0415
Assignment of Assignor's Interest
Recorded: 2003-09-22
Pages: 4
Assignors
SCHUSTER, KARL-HEINZ
Executed: 2003-06-23
ULRICH, WILHELM
Executed: 2003-06-24
GRUNER, TORALF
Executed: 2003-06-23
KRAEHMER, DANIEL
Executed: 2003-06-23
SINGER, WOLFGANG
Executed: 2003-06-23
EPPLE, ALEXANDER
Executed: 2003-06-26
BEIERL, HELMUT
Executed: 2003-06-23
GARREIS, REINER
Executed: 2003-07-07
Assignee
CARL ZEISS SMT AG
CARL-ZEISS-STRASSE 22, 73447 OBERKOCHEN, GERMANY
Covered Property
(1)
Projection Exposure System
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.