Patent Assignment
Reel/Frame 014515/0041
SECURITY INTEREST
Recorded: 2003-09-22
Received: 2003-09-26
Pages: 16
Assignor
VERTEQ, INC.
Executed: 2003-08-29
Assignee
WELLS FARGO FOOTHILL, INC.
2450 COLORADO AVENUE, SANTA MONICA, CA, 90404, UNITED STATES
Covered Applications
(14)
Megasonic cleaning using supersaturated cleaning solution
App. No. 60/477,602
→
MEGASONIC CLEANING SYSTEM WITH BUFFERED CAVITATION METHOD
App. No. 10/341,425
→
WAFER CLEANING
App. No. 10/243,463
→
WAFER CLEANING
App. No. 10/243,486
→
MEGASONIC CLEANER AND DRYER SYSTEM
App. No. 10/171,430
→
Megasonic cleaner and dryer system
App. No. 10/171,494
→
Method of applying liquid to a megasonic apparatus for improved cleaning control
App. No. 10/171,431
→
STACKABLE PROCESS CHAMBERS
App. No. 10/171,429
→
MEGASONIC CLEANER AND DRYER
App. No. 10/171,426
→
RECIPROCATING MEGASONIC PROBE
App. No. 10/140,029
→
MEGASONIC PROBE ENERGY DIRECTOR
App. No. 10/059,682
→
WAFER CLEANING METHOD
App. No. 09/953,504
→
MEGASONIC PROBE ENERGY ATTENUATOR
App. No. 09/922,509
→
Small parts cleaner
App. No. 09/916,357
→