IP Library Granted Patent US 6,684,891
Granted Patent Utility Small
US 6,684,891 · Confirmation No. 5722

WAFER CLEANING

Inventor: Mario E. Bran
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Code Description Pages PDF
2006-11-07 WFEE Fee Worksheet (SB06) 1 View
2003-10-27 IFEE Issue Fee Payment (PTO-85B) 2 View
2002-09-12 TRNA Transmittal of New Application 3 View
2002-09-12 SPEC Specification 18 View
2002-09-12 CLM Claims 1 View
2002-09-12 ABST Abstract 1 View
2002-09-12 DRW Drawings-only black and white line drawings 11 View
2002-09-12 OATH Oath or Declaration filed 2 View
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Quick Facts
Patent No.
US 6,684,891
App. No.
10/243,486
Filed
2002-09-12
Granted
2004-02-03
Pub. No.
US20030015218A1
Art Unit
1746
PTA
-3 days