Patent Assignment
Reel/Frame 014565/0665
Assignment of Assignor's Interest
Recorded: 2003-09-29
Pages: 2
Assignors
HUANG, ZHISONG
Executed: 2003-09-26
LI, LUMIN
Executed: 2003-09-26
SADJADI, REZA
Executed: 2003-09-26
Assignee
LAM RESEARCH CORPORATION
4650 CUSHING PARKWAY, FREMONT, CALIFORNIA, 94538
Covered Property
(1)
Method for Forming a Dual Damascene Structure