Patent Assignment
Reel/Frame 014693/0113
Assignment of Assignor's Interest
Recorded: 2003-11-10
Pages: 2
Assignee
ANELVA CORPORATION
8-1, YOTSUYA 5-CHOME, FUCHU-SHI, TOKYO, 183-8508, JAPAN
Covered Property
(1)
Plasma processing apparatus
Application:
10/704,884 →
Publication:
US 2004/0149216
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.