Patent Assignment
Reel/Frame 014751/0154
Assignment of Assignor's Interest
Recorded: 2003-12-02
Pages: 3
Assignors
ICHIKI, KATSUNORI
Executed: 2003-07-01
YAMAUCHI, KAZUO
Executed: 2003-07-01
HIYAMA, HIROKUNI
Executed: 2003-07-01
SAMUKAWA, SEIJI
Executed: 2003-07-01
Assignee
EBARA CORPORATION
11-1, HANEDA ASAHI-CHO, OHTA-KU, TOKYO 144-8510, JAPAN
Covered Property
(1)
Neutral Particle Beam Processing Apparatus
Related Assignments
(2)
Other recorded transfers of the patent in this record — the chain of ownership.