Patent Assignment
Reel/Frame 014860/0366
Assignment of Assignor's Interest
Recorded: 2003-12-30
Pages: 3
Assignee
LAM RESEARCH CORPORATION
4650 CUSHING PARKWAY, FREMONT, CALIFORNIA, 94538
Covered Property
(1)
Method and Apparatus of Arrayed, Clustered or Coupled Eddy Current Sensor Configuration for Measuring Conductive Film Properties
Related Assignments
(2)
Other recorded transfers of the patent in this record — the chain of ownership.