Method and apparatus of arrayed, clustered or coupled eddy current sensor configuration for measuring conductive film properties
View Patent ↗A method for minimizing measuring spot size and noise during film thickness measurement is provided. The method initiates with locating a first eddy current sensor directed toward a first surface associated with a conductive film. The method includes locating a second eddy current sensor directed toward a second surface associated with the conductive film. The first and second eddy current sensors may share a common axis or be offset from each other. The method further includes alternating power supplied to the first eddy current sensor and the second eddy current sensor, such that the first eddy current sensor and the second eddy current sensor are powered one at a time. In one aspect of the invention, a delay time is incorporated between switching power between the first eddy current sensor and the second eddy current sensor. The method also includes calculating the film thickness measurement based on a combination of signals from the first eddy current sensor and the second eddy current sensor. An apparatus and a system are also provided.
1. A method for minimizing inspection spot size and noise during film thickness measurement, comprising:
locating a first eddy current sensor directed toward a first surface of a substrate associated with a conductive film;
locating a second eddy current sensor directed toward a second surface of the substrate associated with the conductive film, the second surface opposing the first surface;
alternating power supplied to the first eddy current sensor and the second eddy current sensor, such that the first eddy current sensor is powered while the second eddy current sensor is not powered and the first eddy current sensor is not powered while the second eddy current sensor is powered; and
calculating the film thickness measurement based on a combination of signals from the first eddy current sensor and the second eddy current sensor.
2. The method of claim 1 , wherein the method operation of locating a second eddy current sensor directed toward a second surface associated with the conductive film includes,
offsetting an axis of the first eddy current sensor from an axis of the second eddy current sensor.
3. The method of claim 2 , wherein the method operation of alternating power supplied to the first eddy current sensor and the second eddy current sensor includes,
a) supplying power to the first eddy current sensor;
b) terminating power supplied to the first eddy current sensor;
c) waiting for a delay period;
d) supplying power to the second eddy current sensor;
e) terminating power supplied to the second eddy current sensor; and
f) waiting for the delay period.
4. The method of claim 3 , further comprising:
repeating steps a)–f) for each location being measured.
5. The method of claim 1 , wherein the method operation of locating a second eddy current sensor directed toward a second surface associated with the conductive film includes,
aligning the first eddy current sensor to be coaxial with the second eddy current sensor.
6. The method of claim 5 , wherein the method operation of alternating power supplied to the first eddy current sensor and the second eddy current sensor includes,
configuring both of the first eddy current sensor and the second eddy current sensor so that an appearance as an inductive load in minimized when the respective eddy current sensor is passive.
7. The method of claim 6 , wherein the method operation of configuring both of the first eddy current sensor and the second eddy current sensor so that an appearance as an inductive load in minimized when the respective eddy current sensor is passive includes,
incorporating both of the first eddy current sensor and the second eddy current sensor into an open loop.
8. The method of claim 1 , further comprising:
supplying power to both the first eddy current sensor and the second eddy current sensor from a single power supply; and
repeating the alternating of the power such that both the first and the second eddy current sensors are powered at alternating times for each location.