Patent Assignment
Reel/Frame 014866/0353
Assignment of Assignor's Interest
Recorded: 2004-01-09
Pages: 4
Assignors
DE LEEUWE, MARC
Executed: 2003-10-22
ROBERSON, GLENN A., JR.
Executed: 2003-10-26
PALMER, BENTLEY J.
Executed: 2003-10-31
Assignee
SUPERCRITICAL SYSTEMS INC.
2120 W. GUADALUPE ROAD, GIBERT, ARIZONA, 85223
Covered Property
(1)
Removal of Cmp and Post-Cmp Residue from Semiconductors Using Supercritical Carbon Dioxide Process
Related Assignments
(2)
Other recorded transfers of the patent in this record — the chain of ownership.