IP Library › Assignment 015532/0126
Patent Assignment
Reel/Frame 015532/0126

Assignment of Assignor's Interest

Recorded: 2004-07-06 Pages: 2
Assignor
SUPERCRITICAL SYSTEMS, INC.
Executed: 2004-06-29
Assignee
TOKYO ELECTRON LIMITED
AKASAKA 5-CHOME, MINATU-KU, TOKYO 107-848, JAPAN
Covered Property (1)
Removal of Cmp and Post-Cmp Residue from Semiconductors Using Supercritical Carbon Dioxide Process
Patent: 7,064,070 →
Application: 10/396,612 →
Publication: US 2004/0142564
Related Assignments (2)
Other recorded transfers of the patent in this record — the chain of ownership.
Assignment of Assignor's Interest Jan 8, 2004
From: MULLEE, WILLIAM H.
To: SUPERCRITICAL SYSTEMS INC.
Reel/Frame 014933/0807 →
Assignment of Assignor's Interest Jan 9, 2004
From: DE LEEUWE, MARC; ROBERSON, GLENN A., JR.; PALMER, BENTLEY J.
To: SUPERCRITICAL SYSTEMS INC.
Reel/Frame 014866/0353 →