Patent Assignment
Reel/Frame 015532/0126
Assignment of Assignor's Interest
Recorded: 2004-07-06
Pages: 2
Assignor
SUPERCRITICAL SYSTEMS, INC.
Executed: 2004-06-29
Assignee
TOKYO ELECTRON LIMITED
AKASAKA 5-CHOME, MINATU-KU, TOKYO 107-848, JAPAN
Covered Property
(1)
Removal of Cmp and Post-Cmp Residue from Semiconductors Using Supercritical Carbon Dioxide Process
Related Assignments
(2)
Other recorded transfers of the patent in this record — the chain of ownership.