Patent Assignment
Reel/Frame 014942/0353
Assignment of Assignor's Interest
Recorded: 2004-01-27
Pages: 3
Assignors
PERNG, BAW-CHING
Executed: 2003-12-18
CHIU, YUAN-HUNG
Executed: 2003-12-18
SUNG, MEI-HUI
Executed: 2003-12-18
HSU, PENG-FU
Executed: 2003-12-18
Assignee
TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY
NO. 8, LI-HSIN RD. 6, SCIENCE-BASED INDUSTRIAL PARK, HSIN-CHU, 300-77, R.O.C., TAIWAN
Covered Property
(1)
Zirconium Oxide and Hafnium Oxide Etching Using Halogen Containing Chemicals