Patent Assignment
Reel/Frame 014948/0799
Assignment of Assignor's Interest
Recorded: 2004-02-02
Pages: 2
Assignors
TANAKA, MAKI
Executed: 2003-11-07
SHISHIDO, CHIE
Executed: 2003-11-07
NAKAGAKI, RYO
Executed: 2003-11-07
TAKAGI, YUJI
Executed: 2003-11-10
Assignee
HITACHI HIGH-TECHNOLOGIES CORPORATION
24-14, NISHISHINBASHI 1-CHOME, MINATO-KU, TOKYO, JAPAN
Covered Property
(1)
System and Method for Evaluating a Semiconductor Device Pattern, Method for Controlling Process of Forming a Semiconductor Device Pattern and Method for Monitoring a Semiconductor Device Manufacturing Process
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.