IP Library › Assignment 015028/0947
Patent Assignment
Reel/Frame 015028/0947

Assignment of Assignor's Interest

Recorded: 2004-02-27 Pages: 3
Assignors
SINGER, WOLFGANG
Executed: 2003-04-17
WANGLER, JOHANNES
Executed: 2003-04-10
ANTONI, MARTIN
Executed: 2003-04-14
Assignee
CARL-ZEISS SEMICONDUCTOR MANUFACTURING
TECHNOLOGIES AG, CARL-ZEIS STR. 22, OBERKOCHEN, 73447, GERMANY
Covered Property (1)
Collector for an Illumination System with a Wavelength of Less Than or Equal to 193 Nm
Patent: 6,964,485 →
Application: 10/055,608 →
Publication: US 2003/0043455
Related Assignments (2)
Other recorded transfers of the patent in this record — the chain of ownership.
Change of Name Jan 17, 2006
From: CARL ZEISS SEMICONDUCTOR MANUFACTURING TECHNOLOGIES
To: CARL ZEISS SMT AG
Reel/Frame 017200/0143 →
A Modifying Conversion Jan 18, 2011
From: CARL ZEISS SMT AG
To: CARL ZEISS SMT GMBH
Reel/Frame 025763/0367 →