IP Library › Assignment 017200/0143
Patent Assignment
Reel/Frame 017200/0143

Change of Name

Recorded: 2006-01-17 Pages: 8
Assignor
Assignee
CARL ZEISS SMT AG
CARL-ZEISS-STR. 22, OBERKOCHEN, 73447, GERMANY
Covered Property (1)
Collector for an Illumination System with a Wavelength of Less Than or Equal to 193 Nm
Patent: 6,964,485 →
Application: 10/055,608 →
Publication: US 2003/0043455
Related Assignments (2)
Other recorded transfers of the patent in this record — the chain of ownership.
Assignment of Assignor's Interest Feb 27, 2004
From: SINGER, WOLFGANG; WANGLER, JOHANNES; ANTONI, MARTIN
To: CARL-ZEISS SEMICONDUCTOR MANUFACTURING
Reel/Frame 015028/0947 →
A Modifying Conversion Jan 18, 2011
From: CARL ZEISS SMT AG
To: CARL ZEISS SMT GMBH
Reel/Frame 025763/0367 →