Patent Assignment
Reel/Frame 015243/0885
Assignment of Assignor's Interest
Recorded: 2004-10-13
Pages: 5
Assignors
FERRIS, DAVID S.
Executed: 2004-10-11
SRIVASTAVA, ASEEM K.
Executed: 2004-07-27
TUN, MAW S.
Executed: 2004-07-29
Assignee
AXCELIS TECHNOLOGIES, INC.
55 CHERRY HILL DRIVE, BEVERLY, MASSACHUSETTS, 01915
Covered Property
(1)
Multi-piece baffle plate assembly for a plasma processing system
Application:
10/836,516 →
Publication:
US 2005/0241767
Related Assignments
(3)
Other recorded transfers of the patent in this record — the chain of ownership.
Security Agreement
May 9, 2008
From: AXCELIS TECHNOLOGIES, INC.
To: SILICON VALLEY BANK
Reel/Frame 020986/0143 →
Assignment of Assignor's Interest
Dec 21, 2012
From: AXCELIS TECHNOLOGIES, INC.
To: LAM RESEARCH CORPORATION
Reel/Frame 029529/0757 →
Termination of Security Agreement
Apr 16, 2013
From: SILICON VALLEY BANK
To: AXCELIS TECHNOLOGIES, INC.
Reel/Frame 030302/0719 →