Patent Assignment
Reel/Frame 015300/0861
Assignment of Assignor's Interest
Recorded: 2004-05-06
Pages: 3
Assignors
MUTO, SHINJI
Executed: 2003-11-07
TAGUCHI, CHIHIRO
Executed: 2003-11-07
OKAYAMA, NOBUYUKI
Executed: 2003-11-07
Assignee
TOKYO ELECTRON LIMITED
3-6, AKASAKA 5-CHOME, MINATO-KU, TOKYO 107-8481, JAPAN
Covered Property
(1)
Substrate Table, Production Method Therefor and Plasma Treating Device