Substrate table, production method therefor and plasma treating device
The susceptor ( 10 ) of a plasma treating device, or the electrostatic chuck ( 12 ) of a substrate table is formed by ceramic thermal spray method. A ceramic spray layer ( 12 A) is pore-sealed by methacrylic resin ( 12 D). Resin raw material mainly containing methyl methacrylate is applied to and impregnated into the ceramic spray layer and then is cured to thereby fill pores between ceramic particles in the ceramic spray layer with methacrylic resin. Methacrylic resin raw material solution, which does not produce pores at curing, can complete perfect pore sealing.
1. A method for manufacturing a substrate table, comprising the steps of:
preparing a table main body; and
forming on the table main body an electrostatic chuck layer made of a ceramic layer incorporating therein an electrode layer, the step of forming the electrostatic chuck layer including the steps of:
heating the table main body up to a predetermined temperature; and then
forming the ceramic layer by thermally spraying a ceramic material while heating the table main body,
wherein a gas channel for supplying a gas to a substrate is formed in the table main body and, at the step of forming the ceramic layer by thermal spraying, the thermal spraying is performed while ejecting a pressurized air from the gas channel, allowing a gas channel communicating with the gas channel in the table main body to be formed in the thermally sprayed ceramic layer.
2. The method of claim 1 , further comprising the step of sealing pores existing in the ceramic layer by using a methyacrylic resin, the step of sealing pores including the step of impregnating a resin raw material solution containing methyl methacrylate as a main component thereof into the ceramic layer and the step of curing the resin raw material solution.
3. The method of claim 2 , wherein the step of curing the resin raw material solution is performed by a deaeration process.
4. The method of claim 3 , wherein the deaeration process is performed at 0.1 torr or less.
5. The method of claim 1 , wherein the predetermined temperature is about 150° C.
6. A method for manufacturing a substrate table, comprising the steps of:
preparing a table main body;
forming on the table main body an electrostatic chuck layer made of a ceramic layer incorporating therein an electrode layer, the step of forming the electrostatic chuck layer including the step of forming the ceramic layer by thermally spraying a ceramic material while the table main body is heated,
wherein a gas channel for supplying a gas to a substrate is formed in the table main body and, at the step of forming the ceramic layer by thermal spraying, the thermal spraying is performed while ejecting a pressurized air from the gas channel, allowing a gas channel communicating with the gas channel in the table main body to be formed in the thermally sprayed ceramic layer.
7. The method of claim 6 , further comprising the step of sealing pores existing in the ceramic layer by using a methacrylic resin, the step of sealing pores including the step of impregnating a resin raw material solution containing methyl methacrylate as a main component thereof into the ceramic layer and the step of curing the resin raw material solution.
8. The method of claim 7 , wherein the step of curing the resin raw material solution is performed by a deaeration process.
9. The method of claim 8 , wherein the deaeration process is performed at 0.1 torr or less.
10. The method of claim 6 , wherein the table main body is heated to about 150° C.