Patent Assignment
Reel/Frame 015328/0855
Change of Name
Recorded: 2004-05-16
Pages: 4
Assignor
CARL ZEISS SEMICONDUCTOR MANUFACTURING TECHNOLOGIES AG
Executed: 2003-12-09
Assignee
CARL ZEISS SMT AG
CARL-ZEISS-STRASSE 22, OBERKOCHEN, D-73447, GERMANY
Covered Property
(1)
Method and Apparatus for Polishing or Lapping an Aspherical Surface of a Work Piece
Patent:
6,733,369 →
Application:
10/261,455 →
Related Assignments
(2)
Other recorded transfers of the patent in this record — the chain of ownership.