Patent Assignment
Reel/Frame 015335/0694
Assignment of Assignor's Interest
Recorded: 2004-05-12
Pages: 3
Assignors
HSU, STEPHEN DUAN-FU
Executed: 2004-05-11
CORCORAN, NOEL
Executed: 2004-05-12
CHEN, JANG FUNG
Executed: 2004-05-10
Assignee
ASML MASKTOOLS B .V.
P.O. BOX 324, 5500 AH VELDHOVEN, NETHERLANDS
Covered Property
(1)
Orientation Dependent Shielding for Use with Dipole Illumination Techniques
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.