Assignment of Assignor's Interest

Recorded: 2004-05-24 Pages: 3

Assignor

LIEBCHEN, ARMIN

Executed: 2004-05-11

Assignee

ASML MASKTOOLS B.V.

P.O. BOX 324, 5500 AH VELDHOVEN, NETHERLANDS

Covered Property (1)

Method and Apparatus for Providing Lens Aberration Compensation by Illumination Source Optimization

Patent: 7,034,919 →

Application: 10/705,234 →

Publication: US 2004/0184030

Related Assignments (1)

Other recorded transfers of the patent in this record — the chain of ownership.