Patent Assignment
Reel/Frame 015408/0173
Assignment of Assignor's Interest
Recorded: 2004-11-24
Pages: 5
Assignors
SWEENEY, JOSEPH D.
Executed: 2004-11-04
MARGANSKI, PAUL J.
Executed: 2004-11-04
OLANDER, W. KARL
Executed: 2004-11-04
Assignee
ADVANCED TECHNOLOGY MATERIALS, INC.
7 COMMERCE DRIVE, DANBURY, CONNECTICUT, 06810
Covered Property
(1)
Method and Apparatus for the Abatement of Toxic Gas Components from a Semiconductor Manufacturing Process Effluent Stream
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.