Patent Assignment
Reel/Frame 015428/0524
Assignment of Assignor's Interest
Recorded: 2004-06-07
Pages: 2
Assignor
CARL-ZEISS -STIFTUNG, HEIDENHEIM-BRENZ
Executed: 2004-05-17
Assignee
CARL ZEISS SMT AG
CARL-ZEISS-STRASSE 22, 73447 OBERKOCHEN, GERMANY
Covered Property
(1)
Microlithographic Illuminating System and Microlithographic Projection Exposure Arrangement Incorporating Said System
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.