Patent Application
Utility
App. No. 09/820,625
· Confirmation No. 3651
MICROLITHOGRAPHIC ILLUMINATING SYSTEM AND MICROLITHOGRAPHIC PROJECTION EXPOSURE ARRANGEMENT INCORPORATING SAID SYSTEM
Patent Expired Due to NonPayment of Maintenance Fees Under 37 CFR 1.362
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Code | Description | Pages | ||
|---|---|---|---|---|---|
| 2001-03-30 | TRNA |
Transmittal of New Application | 1 | View | |
| 2001-03-30 | SPEC |
Specification | 14 | View | |
| 2001-03-30 | CLM |
Claims | 5 | View | |
| 2001-03-30 | ABST |
Abstract | 1 | View | |
| 2001-03-30 | DRW |
Drawings-only black and white line drawings | 3 | View | |
| 2001-03-30 | OATH |
Oath or Declaration filed | 2 | View |
Inventors
Johannes Wangler
Konigsbronn, GERMANY
Jess Kohler
Oberkochen, GERMANY
Attorneys & Agents of Record
Classification
USPC
359/649
Prosecution
- Examiner
- SCHWARTZ, JORDAN MARC
- Art Unit
- 2872
- Docket No.
- 00024
- Confirmation No.
- 3651
Foreign Priority
100 16 176.6
·
2000-03-31
·
GERMANY
Publication
- Pub. No.
- US20010043408A1
- Pub. Date
- 2001-11-22
Patent Term Adjustment
-52days
No related applications found.
ASSIGNMENT OF ASSIGNOR'S INTEREST
Recorded 2004-06-07
ASSIGNMENT OF ASSIGNOR'S INTEREST
Recorded 2001-06-04
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Quick Facts
- App. No.
- 09/820,625
- Filed
- 2001-03-30
- Granted
- 2003-07-22
- Pub. No.
- US20010043408A1
- Examiner
- SCHWARTZ, JORDAN MARC
- Art Unit
- 2872
- PTA
- -52 days
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