Patent Assignment
Reel/Frame 015466/0347
Assignment of Assignor's Interest
Recorded: 2004-06-16
Pages: 3
Assignors
VAN DEN BROEKE, DOUGLAS
Executed: 2004-05-11
CHEN, JANG FUNG
Executed: 2004-05-10
LAIDIG, THOMAS
Executed: 2004-05-11
WAMPLER, KURT E.
Executed: 2004-05-10
HSU, DUAN-FU STEPHEN
Executed: 2004-05-11
Assignee
ASML MASKTOOLS B.V.
P.O. BOX 324, 5500 AH VELDHOVEN, NETHERLANDS
Covered Property
(1)
Method and Apparatus for Providing Optical Proximity Features to a Reticle Pattern for Deep Sub-Wavelength Optical Lithography
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.