Patent Assignment
Reel/Frame 015482/0090
Assignment of Assignor's Interest
Recorded: 2004-06-18
Pages: 3
Assignor
FUKIAGE, NORIAKI
Executed: 2003-12-04
Assignee
TOKYO ELECTRON LTD.
3-6, AKASAKA 5-CHOME, MINATO-KU, TOKYO, 107-8481, JAPAN
Covered Property
(1)
Processing Apparatus and Cleaning Method