Patent Assignment
Reel/Frame 015492/0673
Assignment of Assignor's Interest
Recorded: 2004-12-28
Pages: 4
Assignees
FRAUNHOFER-GESSELLSCHAFT ZUR FOERDERUNG DER ANGEWANDTEN FORSCHUNG E. V.
HANSASTRASSE 27C, MUNICH, 80686, GERMANY
MICRONIC LASER SYSTEMS AB
P.O. BOX 3141,, TAEBY, S-18303, SWEDEN
Covered Property
(1)
Method and Apparatus for Controlling Exposure of a Surface of a Substrate
Related Assignments
(4)
Other recorded transfers of the patent in this record — the chain of ownership.
Corrective Assignment to Correct the Name of the Assignor and Assignee, Filed on 12-28-04, Recorded on Reel 015492 Frame 0673. Assignor Hereby Confirms the Assignment of Assignor's Interest.
Jan 14, 2005
From: DUERR, PETER; SANDSTROEM, TORBJOERN
To: FRAUNHOFER-GESELLSCHAFT ZUR FOERDERUNG DER ANGEWANDTEN FORSCHUNG E.V.; MICRONIC LASER SYSTEMS AB
Reel/Frame 015582/0143 →
License
Nov 12, 2008
From: MICRONIC LASER SYSTEMS AB
To: ASML NETHERLANDS B.V.
Reel/Frame 021817/0782 →
Release of License Agreement
Jun 17, 2009
From: MICRONIC LASER SYSTEMS AB
To: ASML NETHERLANDS B.V.
Reel/Frame 022835/0217 →
Termination of License Agreement
Jul 8, 2009
From: ASML NETHERLANDS B.V.
To: MICRONIC LASER SYSTEMS AB (PUBL)
Reel/Frame 022917/0810 →