Patent Assignment
Reel/Frame 015582/0143
Corrective Assignment to Correct the Name of the Assignor and Assignee, Filed on 12-28-04, Recorded on Reel 015492 Frame 0673. Assignor Hereby Confirms the Assignment of Assignor's Interest.
Recorded: 2005-01-14
Pages: 5
Assignees
FRAUNHOFER-GESELLSCHAFT ZUR FOERDERUNG DER ANGEWANDTEN FORSCHUNG E.V.
HANSASTRASSE 27C, 80686 MUNICH, GERMANY
MICRONIC LASER SYSTEMS AB
P.O. BOX 3141, S-18303 TAEBY, SWEDEN
Covered Property
(1)
Method and Apparatus for Controlling Exposure of a Surface of a Substrate
Related Assignments
(4)
Other recorded transfers of the patent in this record — the chain of ownership.
Assignment of Assignor's Interest
Dec 28, 2004
From: DUERR, PETER; SANDSTROEM, TORBJOERN
To: FRAUNHOFER-GESSELLSCHAFT ZUR FOERDERUNG DER ANGEWANDTEN FORSCHUNG E. V.; MICRONIC LASER SYSTEMS AB
Reel/Frame 015492/0673 →
License
Nov 12, 2008
From: MICRONIC LASER SYSTEMS AB
To: ASML NETHERLANDS B.V.
Reel/Frame 021817/0782 →
Release of License Agreement
Jun 17, 2009
From: MICRONIC LASER SYSTEMS AB
To: ASML NETHERLANDS B.V.
Reel/Frame 022835/0217 →
Termination of License Agreement
Jul 8, 2009
From: ASML NETHERLANDS B.V.
To: MICRONIC LASER SYSTEMS AB (PUBL)
Reel/Frame 022917/0810 →