Patent Assignment
Reel/Frame 015494/0880
Change of Name
Recorded: 2004-06-28
Pages: 4
Assignor
CARL-ZEISS SEMICONDUCTOR MANUFACTURING TECHNOLOGIES AG
Executed: 2003-12-09
Assignee
CARL ZEISS SMT AG
CARL-ZEISS STRASSE 22, OBERKOCHEN, D-73447, GERMANY
Covered Property
(1)
Adjusting Apparatus for an Optical Element in a Lens System
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.