IP Library › Assignment 015502/0572
Patent Assignment
Reel/Frame 015502/0572

Assignment of Assignor's Interest

Recorded: 2004-06-28 Pages: 2
Assignor
Assignee
CARL ZEISS SMT AG
CARL-ZEISS-STRASSE 22, OBERKOCHEN, 73447, GERMANY
Covered Property (1)
Temperature Compensation Apparatus for Thermally Loaded Bodies of Low Thermal Conductivity
Patent: 6,768,600 →
Application: 09/975,920 →
Publication: US 2002/0074115
Related Assignments (3)
Other recorded transfers of the patent in this record — the chain of ownership.
Assignment of Assignor's Interest Feb 14, 2002
From: DIEKER, THOMAS
To: CARL-ZEISS-STIFTUNG
Reel/Frame 012584/0354 →
Change of Address Feb 28, 2005
From: CARL ZEISS SMT AG
To: CARL ZEISS SMT AG
Reel/Frame 016386/0532 →
A Modifying Conversion Jan 18, 2011
From: CARL ZEISS SMT AG
To: CARL ZEISS SMT GMBH
Reel/Frame 025763/0367 →