Patent Assignment
Reel/Frame 016386/0532
Change of Address
Recorded: 2005-02-28
Pages: 3
Assignor
CARL ZEISS SMT AG
Executed: 2004-07-05
Assignee
CARL ZEISS SMT AG
CARL-ZEISS-STRASSE 22, OBERKOCHEN, D-73447, GERMANY
Covered Property
(1)
Temperature Compensation Apparatus for Thermally Loaded Bodies of Low Thermal Conductivity
Related Assignments
(2)
Other recorded transfers of the patent in this record — the chain of ownership.