Patent Assignment
Reel/Frame 015503/0318
Change of Name
Recorded: 2004-06-28
Pages: 3
Assignor
THERMAL ACQUISITION CORP.
Executed: 2003-10-15
Assignee
AVIZA TECHNOLOGY, INC.
440 KINGS VILLAGE ROAD, SCOTTS VALLEY, CALIFORNIA, 95066
Covered Property
(1)
Injector and Method for Delivering Gaseous Chemicals to a Surface
Patent:
5,136,975 →
Application:
07/542,243 →
Related Assignments
(10)
Other recorded transfers of the patent in this record — the chain of ownership.
Assignment of Assignors Interest.
Jun 21, 1990
From: BARTHOLOMEW, LAWRENCE D.; PROVANCHA, KENNETH M.; KAMIAN, GEORGE; DEDONTNEY, JAY B.
To: WATKINS JOHNSON COMPANY, PALO ALTO, CA A CORP OF CA
Reel/Frame 005353/0770 →
Assignment of Assignor's Interest
Oct 26, 1998
From: WATKINS-JOHNSON COMPANY
To: WJ SEMICONDUCTOR EQUIPMENT GROUP, INC.
Reel/Frame 009525/0899 →
Security Agreement
Nov 2, 1998
From: TSMD ACQUISITION CORP.; STELLEX MICROWAVE SYSTEMS, INC.
To: FIRST UNION COMMERCIAL CORPORATION
Reel/Frame 009556/0267 →
Assignment of Assignor's Interest
Jun 7, 1999
From: WJ SEMICONUCTOR EQUIPMENT GROUP, INC.
To: SEMICONDUCTOR EQUIPMENT GROUP, LLC
Reel/Frame 009968/0765 →
Assignment of Assignor's Interest
Oct 12, 1999
From: SEMICONDUCTOR EQUIPMENT GROUP, LLC
To: SILICON VALLEY GROUP, THERMAL SYSTEMS LLC
Reel/Frame 010263/0951 →
Relinquishment and Amendment to Amended and Restated Patent Security Agreement
Nov 1, 1999
From: TSMD ACQUISITION CORPORATION; STELLEX MICROWAVE SYSTEMS, INC.
To: FIRST UNION COMMERICIAL CORPORATION
Reel/Frame 010310/0553 →
Change of Name
Jun 28, 2004
From: SILICON VALLEY GROUP, INC.
To: ASML US, INC.
Reel/Frame 015505/0155 →
Assignment of Assignor's Interest
Jun 28, 2004
From: ASML US, INC.
To: THERMAL ACQUISITION CORP.
Reel/Frame 015505/0084 →
Merger
Jun 28, 2004
From: SILICON VALLEY GROUP, THERMAL SYSTEMS, LLC.
To: SILICON VALLEY GROUP, INC.
Reel/Frame 015505/0076 →
Intellectual Property Security Agreement
May 9, 2007
From: AVIZA TECHNOLOGY, INC.; AVIZA, INC.
To: UNITED COMMERCIAL BANK
Reel/Frame 019265/0381 →