IP Library › Assignment 010263/0951
Patent Assignment
Reel/Frame 010263/0951

Assignment of Assignor's Interest

Recorded: 1999-10-12 Pages: 21
Assignor
SEMICONDUCTOR EQUIPMENT GROUP, LLC
Executed: 1999-10-06
Assignee
SILICON VALLEY GROUP, THERMAL SYSTEMS LLC
440 KINGS VILLAGE ROAD, SCOTTS VALLEY, CALIFORNIA, 95066
Covered Properties (51)
Fluidized Bed Heater for Semiconductor Processing
Patent: 4,673,799 →
Application: 06/707,262 →
Borosilicate Glass Films for Multilevel Metallization Structures in Semiconductor Devices and Method
Application: 06/907,503 →
Low Temperature Chemical Vapor Deposition of Silicon Dioxide Films
Patent: 4,845,054 →
Application: 07/068,727 →
Industrial Robot for Use in Clean Room Environment
Patent: 4,787,813 →
Application: 07/089,591 →
Cvd Reactor and Gas Injection System
Patent: 4,834,022 →
Application: 07/114,326 →
Atmospheric Pressure Chemical Vapor Deposition Apparatus and Method
Patent: 4,834,020 →
Application: 07/128,806 →
Process for Borosilicate Glass Films for Multilevel Metallization Structures in Semiconductor Devices
Patent: 4,891,247 →
Application: 07/214,909 →
Chemical Vapor Deposition Reactor and Method of Operation
Patent: 4,993,358 →
Application: 07/386,903 →
Multi-Zone Planar Heater Assembly and Method of Operation
Patent: 5,059,770 →
Application: 07/409,125 →
Self Cleaning Flow Control Orifice
Patent: 5,113,789 →
Application: 07/513,807 →
Injector and Method for Delivering Gaseous Chemicals to a Surface
Patent: 5,136,975 →
Application: 07/542,243 →
Electrically Insulating Pipe Coupling Apparatus
Patent: 5,088,773 →
Application: 07/570,122 →
Liquid Source Bubbler
Patent: 5,078,922 →
Application: 07/601,270 →
Liquid Level Sensor Assembly
Patent: 5,029,471 →
Application: 07/601,408 →
Method for Producing Highly Conductive and Transparent Films of Tin and Fluorine Doped Indium Oxide by Apcvd
Patent: 5,122,391 →
Application: 07/668,858 →
Method of Soldering in a Controlled-Convection Surface-Mount Reflow Furnace
Patent: 5,232,145 →
Application: 07/677,661 →
Gas Heater for Processing Gases
Patent: 5,377,300 →
Application: 07/971,490 →
Chemical Vapor Deposition of Silicon Dioxide Using Hexamethyldisilazane
Patent: 5,304,398 →
Application: 08/071,516 →
Single Body Injector and Method for Delivering Gases to a Surface
Application: 08/276,815 →
Method of Planarizing a Layer of Material
Patent: 5,668,063 →
Application: 08/447,809 →
Method of Forming Dielectric Films with Reduced Metal Contamination
Application: 08/573,318 →
Single Body Injector and Method for Delivering Gases to a Surface
Patent: 5,683,516 →
Application: 08/621,772 →
Method for Preparing Crossedlinked Aromatic Polymers as Low K Di- Electrics
Patent: 5,925,420 →
Application: 08/679,864 →
Method of Stress-Relieving Silicon Oxide Films
Patent: 5,786,278 →
Application: 08/704,227 →
Apparatus for Clamping Coupled Flanged Pipes
Application: 08/746,608 →
Direct Drive Rotational Motor with Axial Vacuum
Patent: 5,921,560 →
Application: 08/796,300 →
Protective Gas Shield for Chemical Vapor Deposition Apparatus
Application: 08/800,106 →
Optimization of SIO2 Film Conformality in Atmospheric Pressure Chemical Vapor Deposition
Patent: 5,855,957 →
Application: 08/801,997 →
Method of Reducing Metal Contamination During Semiconductor Processing in a Reactor Having Metal Components
Patent: 5,916,378 →
Application: 08/823,655 →
Exhaust Vent Assembly for Chemical Vapor Deposition Systems
Patent: 5,938,851 →
Application: 08/838,882 →
Method of Manufacturing an Injector for Chemical Vapor Deposition Processing
Patent: 5,935,647 →
Application: 08/869,085 →
Single Body Injector and Method for Delivering Gases to a Surface
Patent: 6,022,414 →
Application: 08/892,469 →
Protective Gas Shield for Chemical Vapor Deposition Apparatus
Patent: 5,944,900 →
Application: 08/976,928 →
Free Floating Shield
Patent: 5,849,088 →
Application: 09/008,024 →
Wafer Carrier and Semiconductor Apparatus for Processing a Semiconductor Substrate
Patent: 6,026,589 →
Application: 09/018,021 →
High Temperature Substrate Transfer Module
Patent: 5,976,258 →
Application: 09/019,349 →
Method of Making Low Kappa Dielectric Inorganic/Organic Hybrid Films
Patent: 6,068,884 →
Application: 09/067,704 →
Chemical Vapor Deposition Apparatus Employing Linear Injectors for Delivering Gaseous Chemicals and Method
Application: 09/113,730 →
Single Body Injector and Deposition Chamber
Patent: 6,200,389 →
Application: 09/113,823 →
Free Floating Shield and Semiconductor Processing System
Patent: 6,056,824 →
Application: 09/185,180 →
Low K Dielectric Inorganic/Organic Hybrid Films and Method of Making
Patent: 6,660,391 →
Application: 09/361,667 →
Wafer Processing Reactor Having a Gas Flow Control System and Method
Application: 60/118,286 →
Trench Isolation Process Using Apcvd Teos: Ozone to Deposit a Trench Fill Oxide Prior to Sidewall Liner Oxidation Growth
Application: 60/127,520 →
Near-Atmospheric Cvd System with Vertically-Stacked Process Chambers
Application: 60/127,532 →
Single-Axis Dual-Wafer Transfer System
Application: 60/127,650 →
Surface Composition and Method for Metal Components
Application: 60/130,783 →
Equal Flow Split Gas Delivery
Application: 60/134,443 →
Gas Delivery Metering Tube
Application: 60/135,358 →
Protective Gas Shield Apparatus
Application: 60/135,362 →
Chemical Vapor Deposition of Silicon Oxide Films Using Alkysiloxane Oligomers with Ozone
Application: 60/143,198 →
Method for in-Situ Ceaning of Silicon Dioxide Deposition Chambers Using Combination Fluorine Chemistries
Application: 60/143,285 →
Related Assignments (25)
Other recorded transfers of the patents in this record — the chain of ownership.
Assignment of Assignors Interest. Mar 1, 1985
From: MAHAWILI, IMAD
To: FOCUS SEMICONDUCTOR SYSTEMS, INC
Reel/Frame 004378/0723 →
Assignment of Assignors Interest. Dec 4, 1987
From: BARTHOLOMEW, LAWRENCE D.; GRALENSKI, NICHOLAS M.; RICHIE, MICHAEL A.; HERSH, MICHAEL L.
To: WATKINS-JOHNSON COMPANY, PALO ALTO, CA. A CORP. OF CA.
Reel/Frame 004817/0975 →
Assignment of Assignors Interest. Sep 19, 1989
From: MAHAWILI, IMAD
To: IMAD MAHAWILI ASSOCIATES, INC.
Reel/Frame 005151/0187 →
Assignment of Assignors Interest. Feb 14, 1990
From: MAHAWILI, IMAD
To: IMAD MAHAWILI ASSOCIATES, INC.
Reel/Frame 005258/0152 →
Assignment of Assignors Interest. Feb 26, 1990
From: GOODRICH, BRIAN C.
To: WATKINS JOHNSON COMPANY, A CA CORP.
Reel/Frame 005574/0099 →
Assignment of Assignors Interest. Apr 24, 1990
From: KAMIAN, GEORGE D.
To: WATKINS JOHNSON COMPANY
Reel/Frame 005298/0132 →
Assignment of Assignors Interest. Jun 15, 1990
From: IMAD MAHAWILLI ASSOCIATES, INC.
To: WATKINS-JOHNSON COMPANY, A CA CORP.
Reel/Frame 005327/0424 →
Assignment of Assignors Interest. Jun 21, 1990
From: BARTHOLOMEW, LAWRENCE D.; PROVANCHA, KENNETH M.; KAMIAN, GEORGE; DEDONTNEY, JAY B.
To: WATKINS JOHNSON COMPANY, PALO ALTO, CA A CORP OF CA
Reel/Frame 005353/0770 →
Assignment of Assignors Interest. Aug 17, 1990
From: GRALENSKI, NICHOLAS M.
To: WATKINS JOHNSON COMPANY, A CORP. OF CA
Reel/Frame 005409/0904 →
Assignment of Assignors Interest. Jan 11, 1991
From: COLLINS, CRAIG C.; RICHIE, MICHAEL A.; WALKER, FRED F.; GOODRICH, BRIAN C.
To: WATKINS JOHNSON COMPANY, A CORP. OF CA
Reel/Frame 005574/0612 →
Assignment of Assignors Interest. Mar 13, 1991
From: MAYER, BRUCE E.
To: WATKINS-JOHNSON COMPANY
Reel/Frame 005644/0528 →
Assignment of Assignors Interest. Mar 29, 1991
From: ALLEY, RICHARD C.; CARMASSI, STEPHEN E.; DALEY, WILLIAM T.; ROFFEY, MICHAEL F.
To: WATKINS-JOHNSON COMPANY, STANFORD RESEARCH PARK, 3333 HILLVIEW AVENUE, PALO ALTO, CALIFORNIA 94304-1253 A CORP. OF CALIFORNIA
Reel/Frame 005663/0140 →
Assignment of Assignors Interest. Nov 4, 1992
From: COLLINS, CRAIG C.; AHLSTROM, ERIC A.
To: WATKINS JOHNSON COMPANY
Reel/Frame 006324/0180 →
Assignment of Assignor's Interest Jun 3, 1993
From: KRUSELL, WILBUR C.; GARCIA, JAMES P.; DOBKIN, DANIEL M.; WALKER, FREDERICK F.
To: WATKINS-JOHNSON COMPANY
Reel/Frame 006588/0014 →
Assignment of Assignor's Interest Sep 20, 1993
From: BILLMEYER, JOHN, TRUSTEE OF THE ESTATE OF FOCUS SEMICONDUCTOR SYSTEMS
To: WATKINS-JOHNSON COMPANY
Reel/Frame 006773/0532 →
Assignment of Assignor's Interest Sep 22, 1994
From: DEDONTNEY, JAY B.; GRALENSKI, NICHOLAS M.; MILLER, ADAM Q.
To: WATKINS-JOHNSON CO.
Reel/Frame 007136/0996 →
Assignment of Assignor's Interest Aug 21, 1995
From: FRY, HOWARD W.; LIGHTFOOT, KURT J.
To: WATKINS JOHNSON COMPANY
Reel/Frame 007594/0543 →
Assignment of Assignor's Interest Aug 24, 1995
From: FRY, HOWARD W.; LIGHTFOOT, KURT J.
To: WATKINS JOHNSON COMPANY
Reel/Frame 007622/0001 →
Assignment of Assignor's Interest Apr 1, 1996
From: CARVALHEIRA, HELDER RODRIGUES
To: WATKINS JOHNSON COMPANY
Reel/Frame 007901/0069 →
Assignment of Assignor's Interest Aug 27, 1996
From: FRY, H. WALLACE
To: WATKINS-JOHNSON COMPANY
Reel/Frame 008191/0966 →
Assignment of Assignor's Interest Oct 4, 1996
From: LEE, CHUNG
To: WATKINS-JOHNSON COMPANY
Reel/Frame 008257/0640 →
Assignment of Assignor's Interest Jan 7, 1997
From: MATEOS, MIGUEL ANGEL; COFFEY, WILLIAM LANGFORD, SR.; PERVORSE, CHARLES AUSTIN
To: WATKINS-JOHNSON COMPANY
Reel/Frame 008322/0213 →
Assignment of Assignor's Interest Feb 7, 1997
From: MOSHTAGH, VAHID SAYAD
To: WATKINS-JOHNSON COMPANY
Reel/Frame 008439/0611 →
Assignment of Assignor's Interest Feb 18, 1997
From: YUAN, ZHENG
To: WATKINS-JOHNSON COMPANY
Reel/Frame 008486/0044 →
Assignment of Assignor's Interest Jun 13, 1997
From: TRAN, DON VAN
To: WATKINS-JOHNSON COMPANY
Reel/Frame 008583/0529 →