Patent Assignment
Reel/Frame 015536/0913
Assignment of Assignor's Interest
Recorded: 2004-06-30
Pages: 3
Assignor
LAGOS, BRYAN C.
Executed: 2004-06-29
Assignee
AXCELIS TECHNOLOGIES, INC.
108 CHERRY HILL DRIVE, BEVERLY, MASSACHUSETTS, 01915-1053
Covered Property
(1)
Method for Fabricating a Johnsen-Rahbek Electrostatic Wafer Clamp
Related Assignments
(2)
Other recorded transfers of the patent in this record — the chain of ownership.