Patent Assignment
Reel/Frame 015602/0019
Assignment of Assignor's Interest
Recorded: 2004-07-23
Pages: 4
Assignors
SINGER, WOLFGANG
Executed: 2004-05-18
HAINZ, JOACHIM
Executed: 2004-05-26
FRASCH, HANS-JOACHIM
Executed: 2004-05-17
WANGLER, JOHANNES
Executed: 2004-05-17
WIETZORREK, JOACHIM
Executed: 2004-06-02
SCHULTZ, JORG
Executed: 2004-05-24
Assignee
CARL ZEISS SMT AG
CARL ZEISS STRASSE 22, 73447 OBERKOCHEN, GERMANY
Covered Property
(1)
Illumination System with Field Mirrors for Producing Uniform Scanning Energy
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.