Patent Assignment
Reel/Frame 015745/0080
Assignment of Assignor's Interest
Recorded: 2004-08-26
Pages: 2
Assignors
FUKUMOTO, YASUHIRO
Executed: 2004-08-10
MASUDA, MITSUHIRO
Executed: 2004-08-10
AZUMA, TORU
Executed: 2004-08-10
Assignee
DAINIPPON SCREEN MFG. CO., LTD.
1-1 TENJINKITA-MACHI, TERANOUCHI-AGARU 4-CHOME, HORIKAWA-DORI, KAMIKYO-KU, KYOTO, 602-8585, JAPAN
Covered Property
(1)
Thermal Processing Apparatus, Thermal Processing Method, and Substrate Processing Apparatus
Related Assignments
(2)
Other recorded transfers of the patent in this record — the chain of ownership.