Thermal processing apparatus, thermal processing method, and substrate processing apparatus
In a thermal processing unit, a substrate is held by a local transport hand to be transported between a transfer section and a heating unit, and subjected to a heat processing by the heating unit. Also, the local transport hand is cooled by a cooling plate in the transfer section.
1. A thermal processing apparatus for performing a thermal processing to a substrate, the thermal processing apparatus being used in a substrate processing apparatus including said thermal processing apparatus and a substrate transport device that carries/takes out the substrate into/from said thermal processing apparatus, said thermal processing apparatus comprising:
a transfer section for receiving/transferring a substrate from/to said substrate transport device;
a heating unit that performs a heat processing to the substrate;
a substrate transport mechanism having a holding unit movable while holding the substrate, and transporting the substrate held by said holding unit between said heating unit and said transfer section;
a cooling unit provided in said transfer section for cooling said holding unit of said substrate transport mechanism; and
a control device that controls said substrate transport mechanism so that said holding unit is cooled by coming into contact with said cooling unit during the heat processing of the substrate by said heating unit.
2. The thermal processing apparatus according to claim 1 , wherein said heating unit and said cooling unit are arranged to be vertically stacked.
3. The thermal processing apparatus according to claim 1 , wherein said cooling unit includes a cooling plate with which said holding unit can come into contact.
4. The thermal processing apparatus according to claim 3 , wherein said cooling plate has a cooling circulation path through which a refrigerant is circulated.
5. The thermal processing apparatus according to claim 3 , wherein said cooling plate is arranged between said transfer section and said heating unit.
6. The thermal processing apparatus according to claim 3 , wherein said control device controls said substrate transport mechanism so that said holding unit comes into contact with said cooling plate during cooling of said holding unit.
7. The thermal processing apparatus according to claim 3 , wherein said transfer section includes a support member provided to project upward from said cooling plate to support a rear side of the substrate.
8. The thermal processing apparatus according to claim 7 , wherein said heating unit includes a movable support member provided to move vertically to support the rear side of the substrate.
9. The thermal processing apparatus according to claim 8 , wherein said holding unit has a slit to avoid interference between said movable support member provided in said heating unit and said support member provided in said transfer section.
10. The thermal processing apparatus according to claim 7 , wherein said support member includes a plurality of support pins.
11. The thermal processing apparatus according to claim 1 , wherein the cooling unit comprises a cooling plate having a substantially planar upper surface.
12. The thermal processing apparatus according to claim 1 , wherein conductively cooling said holding unit comprises making substantial physical contact between the holding unit and an upper surface of a cooling plate within the cooling unit.
13. The thermal processing apparatus according to claim 1 wherein said holding unit is free from internal cooling mechanisms.
14. A substrate processing apparatus comprising:
a thermal processing apparatus that performs a thermal processing to a substrate; and
a substrate transport device that carries/takes out the substrate into/from said thermal processing apparatus while transporting said substrate, said thermal processing apparatus comprising:
a transfer section for receiving/transferring the substrate from/to said substrate transport device;
a heating unit that performs a heat processing to the substrate;
a substrate transport mechanism having a holding unit movable while holding the substrate, and transporting the substrate held by said holding unit between said heating unit and said transfer section;
a cooling unit provided in said transfer section for cooling said holding unit of said substrate transport mechanism, wherein said holding unit is cooled by coming into contact with said cooling unit; and
a control device that controls said substrate transport mechanism so that said holding unit is cooled by coming into contact with said cooling unit during the heat processing of the substrate by said heating unit.
15. A substrate processing apparatus for performing a processing to a substrate, comprising:
a shelf having partition plates provided in a plurality of stages; and
a plurality of thermal processing apparatuses arranged in the plurality of stages in said shelf; and
a substrate transport device that carries/takes out the substrate into/from said plurality of thermal processing apparatuses,
each of said plurality of thermal processing apparatuses comprising:
a transfer section for receiving/transferring the substrate from/to said substrate transport device;
a heating unit that performs a heat processing to the substrate;
a substrate transport mechanism having a holding unit movable while holding the substrate, and transporting the substrate held by said holding unit between said heating unit and said transfer section;
a cooling unit provided in said transfer section for cooling said holding unit of said substrate transport mechanism, wherein said holding unit is cooled by coming into contact with said cooling unit; and
a control device that controls said substrate transport mechanism so that said holding unit is cooled by coming into contact with said cooling unit during the heat processing of the substrate by said heating unit.
16. A thermal processing method in a thermal processing apparatus of a substrate processing apparatus including said thermal processing apparatus and a substrate transport device that carries/takes out the substrate into/from said thermal processing apparatus, comprising the steps of:
receiving the substrate in a transfer section for receiving/transferring the substrate from said substrate transport device,
transporting the substrate received by said transfer section to a heating unit while holding the substrate by a holding unit of a substrate transport mechanism;
performing a heat processing to the substrate in the heating unit; and
cooling said holding unit of said substrate transport mechanism by causing said holding unit to come into contact with a cooling unit provided in said transfer section during the heat processing of the substrate by said heating unit.