Patent Assignment
Reel/Frame 015777/0190
Assignment of Assignor's Interest
Recorded: 2004-09-08
Pages: 2
Assignee
HITACHI VIA MECHANICS, LTD.
2100, KAMIIMAIZUMI, EBINA-SHI, KANAGAWA, JAPAN
Covered Property
(1)
Substrate Processing Apparatus
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.