Patent Assignment
Reel/Frame 015825/0980
Assignment of Assignor's Interest
Recorded: 2004-09-21
Pages: 3
Assignors
VAN DEN NIEUWELAAR, NORBERTUS JOSEPHUS MARTINUS
Executed: 2004-08-31
ONVLEE, JOHANNES
Executed: 2004-09-20
BOUMEN, ROEL
Executed: 2004-09-20
VAN LIEROP, HENRICUS PETRUS JOHANNES
Executed: 2004-08-31
DUMONT, ROBERT JOZEF
Executed: 2004-09-09
ROODA, JACOBUS EELKMAN
Executed: 2004-08-31
Assignee
ASML NETHERLANDS B.V.
DE RUN 6501, NL-5504 DR VELDHOVEN, NETHERLANDS
Covered Property
(1)
Method of Planning Tasks in a Machine, Method of Controlling a Machine, Supervisory Machine Control System, Lithographic Apparatus, Lithographic Processing Cell and Computer Program