Patent Assignment
Reel/Frame 015827/0277
Assignment of Assignor's Interest
Recorded: 2004-09-22
Pages: 2
Assignors
KOYAMA, YASUFUMI
Executed: 2004-08-27
HASHINOKI, KENJI
Executed: 2004-08-27
YAMADA, TAKAHARU
Executed: 2004-09-06
Assignee
DAINIPPON SCREEN MFG. CO., LTD.
1-1 TENJINKITAMACHI, TERANOUCHI-AGARU 4-CHOME, HORIKAWA-DORI, KAMIKYO-KU, KYOTO, JAPAN
Covered Property
(1)
Substrate Processing Apparatus
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.