Patent Assignment
Reel/Frame 015829/0769
Change of Name
Recorded: 2004-09-29
Pages: 3
Assignor
CARL ZEISS SEMICONDUCTOR MANUFACTURING TECHNOLOGIES AG
Executed: 2004-02-23
Assignee
CARL ZEISS SMT AG
CARL-ZEISS-STRASSE 22, OBERKOCHEN, D-73447, GERMANY
Covered Property
(1)
Particle-Optical Lens Arrangement and Method Employing Such a Lens Arrangement
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.