Patent Assignment
Reel/Frame 015848/0859
Assignment of Assignor's Interest
Recorded: 2005-03-07
Pages: 3
Assignor
BABIC, DARKO
Executed: 2005-02-09
Assignee
TOKYO ELECTRON LIMITED
3-6 AKASAKA 5-CHOME, TBS BROADCAST CENTER,, MINATO-KU, TOKYO 107, JAPAN
Covered Property
(1)
Method and System for Controlling a Velocity Field of a Supercritical Fluid in a Processing System