Patent Assignment
Reel/Frame 015857/0580
Assignment of Assignor's Interest
Recorded: 2004-09-30
Pages: 3
Assignors
TAYLOR, TRAVIS R.
Executed: 2004-09-29
YI, JINGANG
Executed: 2004-09-29
NORTON, PETER RICHARD
Executed: 2004-09-29
Assignee
LAM RESEARCH CORPORATION
4650 CUSHING PARKWAY, FREMONT, CALIFORNIA, 94538
Covered Property
(1)
System and Method for in Situ Characterization and Maintenance of Polishing Pad Smoothness in Chemical Mechanical Polishing
Patent:
7,153,182 →
Application:
10/955,044 →
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.