Patent Assignment
Reel/Frame 015868/0627
Assignment of Assignor's Interest
Recorded: 2004-10-01
Pages: 2
Assignors
STONE, LYUDMILA
Executed: 2004-10-01
BARUSSO, SCOTT T.
Executed: 2004-10-01
STONE, DALE K.
Executed: 2004-10-01
PEREL, ALEXANER S.
Executed: 2004-10-01
Assignee
AXCELIS TECHNOLOGIES, INC.
55 CHERRY HILL DRIVE, BEVERLY, MASSACHUSETTS, 01915-1053
Covered Property
(1)
Bellows Liner for an Ion Beam Implanter
Related Assignments
(2)
Other recorded transfers of the patent in this record — the chain of ownership.