Patent Assignment
Reel/Frame 015925/0684
Assignment of Assignor's Interest
Recorded: 2004-10-27
Pages: 3
Assignors
MCFADDEN, ROBERT S.
Executed: 2004-09-23
LIANG, SHURONG
Executed: 2004-09-23
KASPEROVICH, VITALY G.
Executed: 2004-09-24
SRIRAM, MANDYAM A.
Executed: 2004-09-23
Assignee
INTEL CORPORATION
2200 MISSION COLLEGE BOULEVARD, SANTA CLARA, CALIFORNIA, 95052
Covered Property
(1)
Deposition apparatus for providing uniform low-k dielectric
Application:
10/881,095 →
Publication:
US 2005/0284371
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.