Patent Assignment
Reel/Frame 015937/0409
Assignment of Assignor's Interest
Recorded: 2004-10-29
Pages: 3
Assignors
SOCHA, ROBERT JOHN
Executed: 2004-10-07
SHI, XUELONG
Executed: 2004-10-07
VAN DEN BROEKE, DOUGLAS
Executed: 2004-10-12
CHEN, JANG FUNG
Executed: 2004-10-07
Assignee
ASML MASKTOOLS B.V.
P.O. BOX 324, 5500 AH VELDHOVEN, NETHERLANDS
Covered Property
(1)
Feature Optimization Using Interference Mapping Lithography
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.